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1

A brief review of atomic layer deposition: from fundamentals to applications

Johnson, Richard W., Hultqvist, Adam, Bent, Stacey F.

Journal:

Materials Today

Year:

2014

Language:

english

File:

PDF, 2.29 MB

english, 2014

2

Nanoengineering Heterogeneous Catalysts by Atomic Layer Deposition

Singh, Joseph A., Yang, Nuoya, Bent, Stacey F.

Journal:

Annual Review of Chemical and Biomolecular Engineering

Year:

2017

Language:

english

File:

PDF, 3.37 MB

english, 2017

3

Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition

Bakke, Jonathan R., Pickrahn, Katie L., Brennan, Thomas P., Bent, Stacey F.

Journal:

Year:

2011

Language:

english

File:

PDF, 1.35 MB

english, 2011

4

Minimizing Current and Voltage Losses to Reach 25%-Efficient Monolithic Two-Terminal Perovskite-Silicon Tandem Solar Cells

Bush, Kevin A., Manzoor, Salman, Frohna, Kyle, Yu, Zhengshan Jason, Raiford, James A., Palmstrom, Axel F., Wang, Hsin-Ping, Prasanna, Rohit, Bent, Stacey F., Holman, Zachary C, McGehee, Michael D.

Journal:

ACS Energy Letters

Year:

2018

Language:

english

File:

PDF, 1.11 MB

english, 2018

5

Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review

Mackus, Adriaan J. M., Schneider, Joel R., MacIsaac, Callisto, Baker, Jon G., Bent, Stacey F.

Journal:

Chemistry of Materials

Year:

2018

Language:

english

File:

PDF, 3.93 MB

english, 2018

6

Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition

Mullings, Marja N., Hägglund, Carl, Tanskanen, Jukka T., Yee, Yesheng, Geyer, Scott, Bent, Stacey F.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.76 MB

english, 2014

7

Growth Process of Polyaniline Thin Films Formed by Hot Wire CVD

Gillian A. Zaharias, Stacey F. Bent

Journal:

Chemical Vapor Deposition

Year:

2009

Language:

english

File:

PDF, 312 KB

english, 2009

8

A model retinal interface based on directed neuronal growth for single cell stimulation

Neville Z. Mehenti, Greg S. Tsien, Theodore Leng, Harvey A. Fishman, Stacey F. Bent

Journal:

Biomedical Microdevices

Year:

2006

Language:

english

File:

PDF, 5.07 MB

english, 2006

9

A model neural interface based on functional chemical stimulation

Neville Z. Mehenti, Harvey A. Fishman, Stacey F. Bent

Journal:

Biomedical Microdevices

Year:

2007

Language:

english

File:

PDF, 306 KB

english, 2007

10

Surface patterning: Silicon falls into line

Bent, Stacey F.

Journal:

Nature Nanotechnology

Year:

2008

Language:

english

File:

PDF, 316 KB

english, 2008

11

ALD Growth Characteristics of ZnS Films Deposited from Organozinc and Hydrogen Sulfide Precursors

Tanskanen, Jukka T., Bakke, Jonathan R., Bent, Stacey F., Pakkanen, Tapani A.

Journal:

Year:

2010

Language:

english

File:

PDF, 1.04 MB

english, 2010

12

A New Resist for Area Selective Atomic and Molecular Layer Deposition on Metal–Dielectric Patterns

Hashemi, Fatemeh Sadat Minaye, Prasittichai, Chaiya, Bent, Stacey F.

Journal:

The Journal of Physical Chemistry C

Year:

2014

Language:

english

File:

PDF, 1.14 MB

english, 2014

13

Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities

Zhou, Han, Bent, Stacey F.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2013

Language:

english

File:

PDF, 4.95 MB

english, 2013

14

Nucleation-Controlled Growth of Nanoparticles by Atomic Layer Deposition

Lee, Han-Bo-Ram, Mullings, Marja N., Jiang, Xirong, Clemens, Bruce M., Bent, Stacey F.

Journal:

Chemistry of Materials

Year:

2012

Language:

english

File:

PDF, 2.40 MB

english, 2012

15

Nanostructuring Materials for Solar-to-Hydrogen Conversion

Gür, Turgut M., Bent, Stacey F., Prinz, Fritz B.

Journal:

The Journal of Physical Chemistry C

Year:

2014

Language:

english

File:

PDF, 9.28 MB

english, 2014

16

Improving Area-Selective Molecular Layer Deposition by Selective SAM Removal

Prasittichai, Chaiya, Pickrahn, Katie L., Minaye Hashemi, Fatemeh Sadat, Bergsman, David S., Bent, Stacey F.

Journal:

ACS Applied Materials & Interfaces

Year:

2014

Language:

english

File:

PDF, 2.38 MB

english, 2014

17

Area Selective Atomic Layer Deposition by Microcontact Printing with a Water-Soluble Polymer

Mullings, Marja N., Lee, Han-Bo-Ram, Marchack, Nathan, Jiang, Xirong, Chen, Zhebo, Gorlin, Yelena, Lin, Kuang-Po, Bent, Stacey F.

Journal:

Journal of The Electrochemical Society

Year:

2010

Language:

english

File:

PDF, 443 KB

english, 2010

18

Structural evolution of platinum thin films grown by atomic layer deposition

Geyer, Scott M., Methaapanon, Rungthiwa, Johnson, Richard, Brennan, Sean, Toney, Mike F., Clemens, Bruce, Bent, Stacey

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 2.35 MB

english, 2014

19

Improving Performance in Colloidal Quantum Dot Solar Cells by Tuning Band Alignment through Surface Dipole Moments

Santra, Pralay K., Palmstrom, Axel F., Tanskanen, Jukka T., Yang, Nuoya, Bent, Stacey F.

Journal:

The Journal of Physical Chemistry C

Year:

2015

Language:

english

File:

PDF, 1.61 MB

english, 2015

20

Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature

Worsley, Marcus A., Bent, Stacey F., Gates, Stephen M., Fuller, Nicholas C. M., Volksen, Willi, Steen, Michelle, Dalton, Timothy

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2005

Language:

english

File:

PDF, 700 KB

english, 2005

21

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Atomic Layer Deposition of Platinum for Solid Oxide Fuel Cells

Jiang, Xirong, Bent, Stacey F.

Year:

2007

Language:

english

File:

PDF, 1.02 MB

english, 2007

22

Self-Correcting Process for High Quality Patterning by Atomic Layer Deposition

Minaye Hashemi, Fatemeh Sadat, Prasittichai, Chaiya, Bent, Stacey F.

Journal:

Year:

2015

Language:

english

File:

PDF, 1.39 MB

english, 2015

23

Strong coupling of plasmon and nanocavity modes for dual band, near-perfect absorbers and ultrathin photovoltaics

Hägglund, Carl, Zeltzer, Gabriel, Ruiz, Ricardo, Wangperawong, Artit, Roelofs, Katherine, Bent, Stacey F.

Journal:

Year:

2016

Language:

english

File:

PDF, 977 KB

english, 2016

24

Polysulfide ligand exchange on zinc sulfide nanocrystal surfaces for improved film formation

Herron, Steven M., Lawal, Qudus O., Bent, Stacey F.

Journal:

Applied Surface Science

Year:

2015

Language:

english

File:

PDF, 2.07 MB

english, 2015

25

SPIE Proceedings [SPIE SPIE Solar Energy + Technology - San Diego, California (Sunday 21 August 2011)] Next Generation (Nano) Photonic and Cell Technologies for Solar Energy Conversion II - Optical response of 3D nano-architecture solar cells and integration with 3D device physics

Wangperawong, Artit, Tsakalakos, Loucas, Hägglund, Carl, Bent, Stacey F.

Year:

2011

Language:

english

File:

PDF, 934 KB

english, 2011

26

Creating Highly Active Atomic Layer Deposited NiO Electrocatalysts for the Oxygen Evolution Reaction

Nardi, Katie L., Yang, Nuoya, Dickens, Colin F., Strickler, Alaina L., Bent, Stacey F.

Journal:

Advanced Energy Materials

Year:

2015

Language:

english

File:

PDF, 1.20 MB

english, 2015

27

Sequential Regeneration of Self-Assembled Monolayers for Highly Selective Atomic Layer Deposition

Hashemi, Fatemeh Sadat Minaye, Bent, Stacey F.

Journal:

Advanced Materials Interfaces

Year:

2016

Language:

english

File:

PDF, 2.30 MB

english, 2016

28

Selective Deposition of Dielectrics: Limits and Advantages of Alkanethiol Blocking Agents on Metal-Dielectric Patterns

Minaye Hashemi, Fatemeh Sadat, Birchansky, Bradlee R, Bent, Stacey F.

Journal:

ACS Applied Materials & Interfaces

Year:

2016

Language:

english

File:

PDF, 2.76 MB

english, 2016

29

Thermal adsorption-enhanced atomic layer etching of Si 3 N 4

Kim, Woo-Hee, Sung, Dougyong, Oh, Sejin, Woo, Jehun, Lim, Seungkyu, Lee, Hyunju, Bent, Stacey F.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2018

Language:

english

File:

PDF, 1.30 MB

english, 2018

30

Encapsulating perovskite solar cells to withstand damp heat and thermal cycling

Cheacharoen, Rongrong, Boyd, Caleb Clifford, Burkhard, George F., Leijtens, Tomas, Raiford, James Andrew, Bush, Kevin Alexander, Bent, Stacey, McGehee, Michael D.

Journal:

Sustainable Energy Fuels

Year:

2018

Language:

english

File:

PDF, 1.49 MB

english, 2018

31

Theoretical and Experimental Studies of CoGa Catalysts for the Hydrogenation of CO2 to Methanol

Singh, Joseph A., Cao, Ang, Schumann, Julia, Wang, Tao, Nørskov, Jens K., Abild-Pedersen, Frank, Bent, Stacey F.

Journal:

Catalysis Letters

Year:

2018

Language:

english

File:

PDF, 1.95 MB

english, 2018

32

Area Selective Atomic Layer Deposition Assisted by Self-Assembled Monolayers: A Comparison of Cu, Co, W and Ru

Bobb-Semple, Dara, Nardi, Katie Lynn, Draeger, Nerissa, Hausmann, Dennis M., Bent, Stacey F.

Journal:

Chemistry of Materials

Year:

2019

File:

PDF, 990 KB

2019

33

Growth of a Surface-Tethered, All-Carbon Backboned Fluoropolymer by Photoactivated Molecular Layer Deposition

Closser, Richard G., Lillethorup, Mie, Bergsman, David S., Bent, Stacey F.

Journal:

ACS Applied Materials & Interfaces

Year:

2019

Language:

english

File:

PDF, 1.88 MB

english, 2019

34

A Selective Toolbox for Nanofabrication

Lee, Han-Bo-Ram, Bent, Stacey F.

Journal:

Chemistry of Materials

Year:

2020

File:

PDF, 536 KB

2020

35

Atomic Layer Deposition of CdS Quantum Dots for Solid-State Quantum Dot Sensitized Solar Cells

Thomas P. Brennan, Pendar Ardalan, Han-Bo-Ram Lee, Jonathan R. Bakke, I-Kang Ding, Michael D. McGehee, Stacey F. Bent

Journal:

Advanced Energy Materials

Year:

2011

Language:

english

File:

PDF, 831 KB

english, 2011

36

Quantum-Dot-Sensitized Solar Cells: Atomic Layer Deposition of CdS Quantum Dots for Solid-State Quantum Dot Sensitized Solar Cells (Adv. Energy Mater. 6/2011)

Thomas P. Brennan, Pendar Ardalan, Han-Bo-Ram Lee, Jonathan R. Bakke, I-Kang Ding, Michael D. McGehee, Stacey F. Bent

Journal:

Advanced Energy Materials

Year:

2011

File:

PDF, 2.56 MB

2011

37

Thin collagen film scaffolds for retinal epithelial cell culture

James T. Lu, Christina J. Lee, Stacey F. Bent, Harvey A. Fishman, Eric E. Sabelman

Journal:

Year:

2007

Language:

english

File:

PDF, 653 KB

english, 2007

38

Spatial control over atomic layer deposition using microcontact-printed resists

Xirong Jiang, Rong Chen, Stacey F. Bent

Journal:

Surface and Coatings Technology

Year:

2007

Language:

english

File:

PDF, 918 KB

english, 2007

39

Tertiary amide chemistry at the Ge(1 0 0)-2 × 1 surface

Albert J. Keung, Michael A. Filler, David W. Porter, Stacey F. Bent

Journal:

Surface Science

Year:

2005

Language:

english

File:

PDF, 283 KB

english, 2005

40

Reaction of tert-butyl isocyanate and tert-butyl isothiocyanate at the Ge(100) − 2 × 1 Surface

Paul W. Loscutoff, Keith T. Wong, Stacey F. Bent

Journal:

Surface Science

Year:

2010

Language:

english

File:

PDF, 1.20 MB

english, 2010

41

Coverage dependence of glycine adsorption on the Ge(100) − 2 × 1 surface

Jessica S. Kachian, Soon Jung Jung, Sehun Kim, Stacey F. Bent

Journal:

Surface Science

Year:

2011

Language:

english

File:

PDF, 1.63 MB

english, 2011

42

Infrared spectroscopy of methyl groups on silicon

Maynard J. Kong, Szetsen S. Lee, Julia Lyubovitsky, Stacey F. Bent

Journal:

Chemical Physics Letters

Year:

1996

Language:

english

File:

PDF, 561 KB

english, 1996

43

The effect of filament temperature on the gaseous radicals in the hot wire decomposition of silane

H.L Duan, G.A Zaharias, Stacey F Bent

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 102 KB

english, 2001

44

The Artificial Synapse Chip: A Flexible Retinal Interface Based on Directed Retinal Cell Growth and Neurotransmitter Stimulation

Mark C. Peterman, Neville Z. Mehenti, Kalayaan V. Bilbao, Christina J. Lee, Theodore Leng, Jaan Noolandi, Stacey F. Bent, Mark S. Blumenkranz, Harvey A. Fishman

Journal:

Artificial Organs

Year:

2003

Language:

english

File:

PDF, 236 KB

english, 2003

45

Determination of human lens capsule permeability and its feasibility as a replacement for Bruch's membrane

Christina J. Lee, Jonathan A. Vroom, Harvey A. Fishman, Stacey F. Bent

Journal:

Year:

2006

Language:

english

File:

PDF, 250 KB

english, 2006

46

Spatial cues for the enhancement of retinal pigment epithelial cell function in potential transplants

Christina J. Lee, Harvey A. Fishman, Stacey F. Bent

Journal:

Year:

2007

Language:

english

File:

PDF, 808 KB

english, 2007

47

Detection of open or closed porosity in low-κ dielectrics by solvent diffusion

Marcus A. Worsley, Mark Roberts, Stacey F. Bent, Stephen M. Gates, Thomas Shaw, Willi Volksen, Robert Miller

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 153 KB

english, 2005

48

The influence of filament material on radical production in hot wire chemical vapor deposition of a-Si:H

H.L. Duan, Stacey F. Bent

Journal:

Thin Solid Films

Year:

2005

Language:

english

File:

PDF, 163 KB

english, 2005

49

Characterization of polyconjugated thin films synthesized by hot-wire chemical vapor deposition of aniline

Gillian A. Zaharias, Helen H. Shi, Stacey F. Bent

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 189 KB

english, 2006

50

The surface as molecular reagent: organic chemistry at the semiconductor interface

Michael A. Filler, Stacey F. Bent

Journal:

Progress in Surface Science

Year:

2003

Language:

english

File:

PDF, 890 KB

english, 2003